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PCB ASSY S MIF INTERCONNECT BOARD
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PCB ASSEMBLY, CHAMBER SET INTERFACE
Rev no.: Rev 01 case no. 0100-02071
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ASSY,PCB EP VGA INTERCONNECT
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DIGITAL I/O BOARD ASSY
Rev no.: REV. 001
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PCB,ASSY, GAS PANEL SAFETY INTLK
Rev no.: Rev B
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PCB ASSEMBLY, WAFER ROTATION INTERFACE
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5 PHASE STEPPER MOTOR DRIVER INTERFACE
Rev no.: REV A
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SERIPLEX I/O DISTRIBUTION BD
Rev no.: REV. P2
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PCB ASSEMBLY, GAS PANEL DISTRIBUTION
Rev no.: Rev 003
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CHAMBER INTERFACE BD
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ASSEMBLY PCB,CONFIGURABLE INTERLOCK
Status: USED FOR PARTS
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ASSY PCB, LOADLOCK INTERLOCKS
Rev no.: Rev A
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